Berger, R.R.BergerSchneider, C.C.SchneiderLehnert, W.W.LehnertPfitzner, L.L.PfitznerRyssel, H.H.Ryssel2022-03-032022-03-031996https://publica.fraunhofer.de/handle/publica/187818en670620530Advanced process control system for vertical furnacesbook article