Lisec, T.T.LisecStoppel, F.F.StoppelKaden, D.D.KadenHeinrich, F.F.HeinrichNeumann, A.A.NeumannWagner, B.B.Wagner2022-03-132022-03-132017https://publica.fraunhofer.de/handle/publica/39861910.1109/TRANSDUCERS.2017.7994474Ohmic MEMS switches can be operated reliable under DC load if important factors determining its reliability are considered as a whole. First of all, these are bi-directional actuation with high forces, a very low contact resistance and good heat dissipation. The present work describes the reliability of a surface-micromachined ohmic switch with gold contacts, combining all this features. Hot switching of 50mA at 10Vdc is possible in ambient air for more than 50 million cycles. With a load of 10mA more than 100 million cycles have been demonstrated repeatedly.enconference paper