Gebhardt, A.A.Gebhardt2022-03-032022-03-031998https://publica.fraunhofer.de/handle/publica/193401Today, excellent methods are available for the production of micro-systems in the sub-micrometer range. However, in cases where structures measured in micrometers are adequate, classical machining methods such as milling, drilling and turning, in refined form, are also particularly suitable.deMikrostrukturMikrosystemspanende Bearbeitung620journal article