Hilbert, V.V.HilbertTschernajew, M.M.TschernajewKlas, R.R.KlasLimpert, J.J.LimpertRothhardt, J.J.Rothhardt2022-03-062022-03-062020https://publica.fraunhofer.de/handle/publica/26437710.1063/1.5133154We report on a compact high-photon-flux extreme ultraviolet (XUV) source based on high harmonic generation. A high XUV-photon flux (>1013 photons/s) is achieved at 21.8 eV and 26.6 eV. The narrow spectral bandwidth (DE/E < 10−3) of the generated harmonics is in the range of state-of-the-art synchrotron beamlines and enables high resolution spectroscopy experiments. The robust design based on a fiber-laser system enables turnkey-controlled and even remotely controlled operation outside specialized laser laboratories, which opens the way for a variety of applications.en620A compact, turnkey, narrow-bandwidth, tunable, and high-photon-flux extreme ultraviolet sourcejournal article