Viegas, A.A.ViegasMart, C.C.MartCzernohorsky, M.M.Czernohorsky2022-03-152022-03-152020https://publica.fraunhofer.de/handle/publica/41198610.1109/IFCS-ISAF41089.2020.9234899Doped hafnium oxide films show good antiferroelectric (AFE) like properties that can be used for energy storage devices. In this paper, we propose the use of AFE silicon doped HfO2 on a 3D patterned substrate and evaluate its properties such as storage density, efficiency and endurance using different doping levels of silicon and different thicknesses. We show that a 3D substrate plays a key role in the enhancement of the energy storage without any loss in efficiency and endurance compared to planar samples from literature.en621conference paper