Pruijmboom, A.A.PruijmboomBooij, S.S.BooijSchemmann, M.M.SchemmannWerner, K.K.WernerHoeven, P.P.HoevenLimpt, H. vanH. vanLimptIntemann, S.S.IntemannJordan, R.R.JordanFritzsch, T.T.FritzschOppermann, H.H.OppermannBarge, M.M.Barge2022-03-112022-03-112009https://publica.fraunhofer.de/handle/publica/36540310.1117/12.808810It has been previously published [1] how, using two separate Vertical-Cavity-Surface-Emitting-Lasers (VCSELs), a miniature laser-Doppler interferometer can be made for quasi-three-dimensional displacement measurements. For the use in consumer applications as PC-mice, the manufacturing costs of such sensors need to be minimized. This paper describes the fabrication of a low-cost laser-self-mixing sensor by integrating silicon and GaAs components using flipchip technology. Wafer-scale lens replication on GaAs wafers is used to achieve integrated optics. In this way a sensor was realized without an external lens and that uses only a single GaAs VCSEL crystal, while maintaining its quasi-threedimensional sensor capabilities.en621conference paper