Reibold, M.M.ReiboldMeyer, C.F.C.F.MeyerSchultrich, B.B.SchultrichSchultrich, H.H.Schultrich2022-03-092022-03-092000https://publica.fraunhofer.de/handle/publica/335185TEM investigations reveal the large structural differences of carbon films prepared by modified deposition conditions. Laser induced vacuum deposition (Laser-Arc) enables the deposition of superhard, amorphous films with dominating diamond bonds. By suitable addition of noble gas during the plasma deposition nano-structured carbon films are produced. They consist of densely packed stacks of curved graphene lamellae resembling nano-onions or nano-tubes. TEM-investigation of top view and cross sectional images shows quite different structures. These results led to the concept of nano-tube-like inclusions. This structural model is supported by simulations based on the multi-slice method.enStrukturKeramikKohlenstoffMultischichtNanomaterialienGrenzflächeLaser-ArcKohlenstoff-SchichtenNanotechnologie667621671conference paper