Assessing various analytical techniques with different lateral resolution by investigating spin-coated inorganic contamination on Si surfaces

Grasso, S.S.GrassoCazzini, E.E.CazziniBersani, M.M.BersaniLazzeri, P.P.LazzeriGennaro, S.S.GennaroKolbe, M.M.KolbeMüller, M.M.MüllerKregsamer, P.P.KregsamerPosch, F.F.Posch2022-03-042022-03-042009https://publica.fraunhofer.de/handle/publica/22061510.1149/1.3204421en670620530Assessing various analytical techniques with different lateral resolution by investigating spin-coated inorganic contamination on Si surfacesjournal article