Deposition of hard wear-resistant coatings by reactive D.C. plasmatron sputtering

Schiller, S.S.SchillerHeisig, U.U.HeisigBeister, G.G.BeisterSteinfelder, K.K.SteinfelderStrümpfel, J.J.StrümpfelKorndörfer, C.C.KorndörferSieber, W.W.Sieber2022-03-022022-03-021984https://publica.fraunhofer.de/handle/publica/17150010.1016/0040-6090(84)90196-2en667670620541Deposition of hard wear-resistant coatings by reactive D.C. plasmatron sputteringjournal article