Bader, U.U.BaderDorner, J.J.DornerSchließer, J.J.SchließerKaufmann, T.S.T.S.KaufmannGarbers, M.M.Garbers2022-03-092022-03-091998https://publica.fraunhofer.de/handle/publica/330268The importance of using automated material handling systems in the microelectronics industry is constantly increasing. This paper gives an overall view of the necessary steps to take when planning, selecting and installing automated transport and stocker systems in the microelectronics industry. Therefore, a new flexible transportation concept, the "equipment/(stocker)/equipment" concept was developed, analysed and optimised by a comprehensive fab simulation study. The advantages of fab simulation to obtain more detailed and optimum planning results, and to have an ideal layout for automation will be shown. A cost model and a Cost Benefit Analysis to assist the selection and evaluation of automated material handling solutions in semiconductor manufacturing based on technological performance and cost requirements is presented.deautomated material handling systemAutomatisierungIndustrieMaterialflussMicroelectronics IndustryMikroelektronikMikroelektronische IndustriePlanung670conference paper