Kobs, K.K.KobsDimigen, H.H.DimigenHuebsch, H.H.HuebschTolle, H.J.H.J.TolleLeutenecker, R.R.LeuteneckerRyssel, H.H.Ryssel2022-03-022022-03-021986https://publica.fraunhofer.de/handle/publica/17362810.1063/1.97129In beam mixing yielded a distinct enhancement in the sliding life of sputtered MoS sub x films without any deterioration of the excellent lubrication properties. This effect occurs only at higher ion energies indicating an improvement film-substrate adherence caused by a mixing of the interface, which was confirmed by secondary ion mass spectrometry and topographical investigations. In addition to that a considerable enhancement of the film density was found due to a reorientation of the MoS sub x platelets which led also to an improvement of the effective film thickness.en670620530621journal article