Schlenker, DirkDirkSchlenker2022-03-042022-03-042014https://publica.fraunhofer.de/handle/publica/235944Integrated manufacturing solutions require multi-functional and compact equipment and tools. Examples of this are the described miniaturized fluid systems for high-precision dosing of small quantities of liquid and the solution of an intelligent and process supporting workpiece carrier for active support in high-precision machining and assembly in manufacturing.enMikrosystemtechnikmicrosystemsMicrosystem Technology (MST)manufacturingMikrotechnikFertigungbook article