Roth, M.M.RothDera, T.T.DeraHillerich, B.B.HillerichDrost, A.A.DrostHartinger, R.R.HartingerWendler, F.F.WendlerEndres, H.-E.H.-E.Endres2022-03-032022-03-031998https://publica.fraunhofer.de/handle/publica/19234610.1016/S0924-4247(98)00094-6Cross sensitivity, especially to humidity, is a common problem in the analysis of chemical gas sensor signals. To identify the contributions of two gas components at least two suitable signals are needed. This article presents a new chemical sensor unit which is a combination of a quartz crystal microbalance and a dielectric sensor. Thus it yields information about both the mass and the dielectrice of the same chemical sensitive film. To make this an universal element for gas sensing, a heater and a temperature gauge are also integrated directly on the quartz by thin film technology. This allows the application of temperature modulation techniques to the quartz microbalance principle.encarbon dioxidegas sensorheaterinterdigital capacitorisothermquartzquartz crystal microbalance537journal article