Traps and trapping phenomena and their implications on electrical behavior of high-k capacitor stacks

Paskaleva, A.A.PaskalevaLemberger, M.M.LembergerAtanassova, E.E.AtanassovaBauer, A.J.A.J.Bauer2022-03-042022-03-042011https://publica.fraunhofer.de/handle/publica/22435110.1116/1.3521501en670620530533Traps and trapping phenomena and their implications on electrical behavior of high-k capacitor stacksjournal article