Baumbach, T.T.BaumbachLübbert, D.D.LübbertGailhanou, M.M.Gailhanou2022-03-032022-03-031999https://publica.fraunhofer.de/handle/publica/19507910.1088/0022-3727/32/10A/340Single and multilayer surface gratings of the system GaInAs/InP are studied by x-ray diffraction reciprocal space mapping. From the diffraction data we determine the gratting period and shape, the vertical compositional set-up and the non-uniform strain field caused by elastic strain relaxation after surface patterning. In particular, we report a full quantitative strain analysis of such structures. The fitting procedure is based on strain calculation employing linear elasticity theory.enelastic constantsnanostructurestrainsurface characterizationx-ray inspection620658670530journal article