Under CopyrightKray, DanielDanielKrayFell, AndreasAndreasFellHopman, SybilleSybilleHopmanMayer, K.K.MayerGlunz, Stefan W.Stefan W.GlunzWilleke, GerhardGerhardWilleke2022-03-1028.11.20122007https://publica.fraunhofer.de/handle/publica/35772110.24406/publica-fhg-357721Abstract Laser Chemical Processing (LCP) is presented as a novel microstructuring method for multiple applications. Via the combination of a chemical liquid jet and a laser beam, thermochemical and photochemical reactions can be initiated. Due to the free choice of the chemistry for the carrier liquid and the laser source efficient processes can be devised for a large variety of applications. We present some examples for the microstructuring of silicon with the focus on etching, phosphorus doping and the combination of both.enpresentation