Imaging defect luminescence of 4H-SiC by UV-photoluminescence

Under CopyrightKaminzky, DanielDanielKaminzkyRoßhirt, KatharinaKatharinaRoßhirtKallinger, BirgitBirgitKallingerBerwian, PatrickPatrickBerwianFriedrich, JochenJochenFriedrichOppel, SteffenSteffenOppelSchneider, AdrianAdrianSchneiderSchütz, MichaelMichaelSchütz2022-03-1221.4.20152015https://publica.fraunhofer.de/handle/publica/38824010.24406/publica-fhg-388240ensemiconductorsilicon carbidedefectsphotoluminescence670620530Imaging defect luminescence of 4H-SiC by UV-photoluminescencepresentation