Oliva, M.M.OlivaBenkenstein, T.T.BenkensteinFlemming, M.M.FlemmingZeitner, U.D.U.D.Zeitner2022-03-112022-03-112009https://publica.fraunhofer.de/handle/publica/36547710.1117/12.834223We discuss AFM (Atomic Force Microscopy) characterization in terms of critical dimension and depth for large area micro-optical elements. Results are shown and discussed in comparison with other techniques, such as SEM (Scanning Electron Microscopy) for CD measurements and FIB (Focused Ion Beam)-SEM characterization for the structure profile.en620conference paper