Duparre, A.A.DuparreGliech, S.S.GliechHehl, K.K.HehlPichlmaier, U.U.PichlmaierSchuhmann, U.U.Schuhmann2022-03-092022-03-091994https://publica.fraunhofer.de/handle/publica/322674A theoretical formalism and experimental methods are presented, which enable statistical fluctuations of the film bulk and interface roughness properties to be estimated from volume scattering and roughness scattering, respectively. The theoretical model is implemented in a numerical algorithm that allows to optimize experimental strategies and to determine morphological parameters from measured scattering curves. Angle resolved scattering (ARS) measurements are performed on MgF2 films on glass substrates while varying the illumination and observation parameters. Atomic force microscopy (AFM) provides helpful additional information on the surface morphology.endünne SchichtLichtstreuunglight scatteringMikrostrukturOberflächenrauheitsurface roughnessthin film microstructure620conference paper