Scheiding, S.S.ScheidingYi, A.Y.A.Y.YiGebhardt, A.A.GebhardtLosse, R.R.LosseLi, L.L.LiRisse, S.S.RisseEberhardt, R.R.EberhardtTünnermann, A.A.Tünnermann2022-03-112022-03-112011https://publica.fraunhofer.de/handle/publica/37100310.1117/12.8747512-s2.0-79953677795Diamond-micro milling and ultra-precision free-form turning technologies for fabricating micro lens arrays (MLA) with a large number of lenslets are explained in detail and compared. Besides the programming of the toolpath, correction loops and cutting parameters are presented. Both technologies are compared regarding achievable form deviation, roughness and economic factors like machining time. The paper offers a guideline for ultra-precision machining of micro lens array master molds on planar substrates and curved surfaces.enmicro lens arraydiamond-micro millingfree-form machiningFast Tool Servowafer level manufacturingdiamond turningmold insertmicro optic620conference paper