Zwicker, G.2022-03-122022-03-122012https://publica.fraunhofer.de/handle/publica/379138As the result of increased co-operation between local CMP users groups in Europe, Japan, Korea, Taiwan, and the United States of America, the International Conference on Planarization/CMP Technology ICPT has been established as the most respected annual gathering on this topic. The ICPT program 2012 covers the following topical interests - front-end dielectrics - front-end metals - equipment, endpoint and control - 3D, TSV & MEMS - consumables metrology - fundamentals - new CMP applications - consumablesen621conference proceeding