Hiller, K.K.HillerKurth, S.S.KurthZichner, N.N.ZichnerGessner, T.T.GessnerDötzel, W.W.DötzelIwert, T.T.IwertFritsch, H.H.FritschBiehl, S.S.Biehl2022-03-092022-03-092001https://publica.fraunhofer.de/handle/publica/339069en621Bulk micromachined and wafer bonded resonators for vacuum pressure measurementconference paper