Sandmaier, H.H.SandmaierKühl, K.K.KühlObermeier, E.E.Obermeier2022-03-082022-03-081987https://publica.fraunhofer.de/handle/publica/315904A piezoresistive accelerometer with a measurement range of 100g which utilizes the batch processing advantages of silicon technology is presented. The sensor differentiates itself from its predecessors in that the seismic mass is suspended from two supporting deflection beams. The acceleration is detected through 8 resistors connected together in a bridge circuit. The advantages of this new design are a comparatively high product between sensitivity and bandwidth as well as cross-acceleration sensitivity compensation. The sensor is characterized by a sensitivity of 20 mV/V F.S.O. with its first resonant frequency at 3.65 kHz. The seismic mass of the sensor is roughly 4.1 mg. (IFT)enEckenkompensationpiezoresistiver EffektQuerempfindlichkeitskompensationconference paper