Seiboth, F.F.SeibothBrückner, D.D.BrücknerKahnt, M.M.KahntLyubomirskiy, M.M.LyubomirskiyWittwer, F.F.WittwerDzhigaev, D.D.DzhigaevUllsperger, T.T.UllspergerNolte, S.S.NolteKoch, F.F.KochDavid, C.C.DavidGarrevoet, J.J.GarrevoetFalkenberg, G.G.FalkenbergSchroer, C.G.C.G.Schroer2022-03-062022-03-062020https://publica.fraunhofer.de/handle/publica/26586410.1107/S16005775200079002-s2.0-85090289756Modern subtractive and additive manufacturing techniques present new avenues for X-ray optics with complex shapes and patterns. Refractive phase plates acting as glasses for X-ray optics have been fabricated, and spherical aberration in refractive X-ray lenses made from beryllium has been successfully corrected. A diamond phase plate made by femtosecond laser ablation was found to improve the Strehl ratio of a lens stack with a numerical aperture (NA) of 0.88 × 10−3 at 8.2 keV from 0.1 to 0.7. A polymer phase plate made by additive printing achieved an increase in the Strehl ratio of a lens stack at 35 keV with NA of 0.18 × 10−3 from 0.15 to 0.89, demonstrating diffraction-limited nanofocusing at high X-ray energies.enaberration correctionphase plateptychographydiffractive-refractive X-ray optics620539journal article