Kohl, D.D.KohlHeiland, G.G.HeilandDobos, K.K.DobosMokwa, W.W.MokwaZimmer, G.G.Zimmer2022-03-082022-03-081985https://publica.fraunhofer.de/handle/publica/313848en621Detection of arsine by MOS devices and oxide films - a comparisonconference paper