Finite Element Analysis for BEOL Stress Engineering to Improve Yield and Reliability of sub-30 nm Structures

Kaulfersch, EberhardEberhardKaulferschBrämer, BirgitBirgitBrämerRzepka, SvenSvenRzepkaBreuer, D.D.BreuerCluass, E.E.CluassFeustel, F.F.Feustel2022-03-122022-03-122013https://publica.fraunhofer.de/handle/publica/38229210.1109/ISCDG.2013.66563142-s2.0-84892144635enFinite Element Analysis for BEOL Stress Engineering to Improve Yield and Reliability of sub-30 nm Structuresconference paper