Development of commercial CMOS process-based technologies for the fabrication of smart accelerometers

Schnakenberg, U.U.SchnakenbergWagner, B.B.WagnerBenecke, W.W.BeneckeRiethmüller, W.W.Riethmüller2022-03-082022-03-081991https://publica.fraunhofer.de/handle/publica/318506en621Development of commercial CMOS process-based technologies for the fabrication of smart accelerometersconference paper