High-resolution material and surface topography characterization by a modified low-coherence interferometer

Under CopyrightTaudt, ChristopherChristopherTaudtBaselt, TobiasTobiasBaseltKoch, EdmundEdmundKochHartmann, PeterPeterHartmann2022-03-1325.11.20162016https://publica.fraunhofer.de/handle/publica/39376910.24406/publica-fhg-393769en621671High-resolution material and surface topography characterization by a modified low-coherence interferometerposter