Uhlmann, E.E.UhlmannLangmack, M.M.LangmackGarn, R.R.GarnOberschmidt, D.D.OberschmidtFecher, J.J.FecherRosiwal, S.M.S.M.RosiwalSinger, R.F.R.F.Singer2022-03-112022-03-112011https://publica.fraunhofer.de/handle/publica/3754822-s2.0-84908255357Due to its thermal working principle and its independency of the work piece's mechanical properties, Micro Electrical Discharge Machining (EDM) is predestined for fabricating holes with diameters of below dh = 200 m at minimum tolerances of ± 1 m. Besides the use of special pulse generators providing discharge currents of down to ie = 100 mA at discharge durations of te 40 ns an important process factor is the tool electrodés material which has a great influence on the machining time and result, and the electrodés wear [1, 2, 3]. To assure an efficient process at a high accuracy and a low tool wear, basic properties demanded for electrodes are an excellent electrical and thermal conductivity as well as a high melting temperature, and a high mechanical strength.enconference paper