Schließer, J.J.SchließerStaudt-Fischbach, P.P.Staudt-Fischbach2022-03-092022-03-091999https://publica.fraunhofer.de/handle/publica/333383The paper will provide information obtained from several experiments and their results. From the obstruction of airflows resulting from such items as hotplates, it has been possible to develop a method for designing minienvironment systems required to handle thermal problems.encontamination controlminienvironmentthermal effectSubstrate CleanroomReinraumKontamination670conference paper