Boehringer, M.M.BoehringerPillion, J.E.J.E.PillionErdmann, V.V.ErdmannRygula, M.M.RygulaWinz, K.K.WinzBrauchle, P.P.BrauchleAquino, D.D.AquinoZhang, H.H.ZhangZahka, J.J.ZahkaZielonka, G.G.ZielonkaHauber, J.J.Hauber2022-03-092022-03-092001https://publica.fraunhofer.de/handle/publica/337263en670620530Effect of copper on the breakthrough voltage of Poly-Si - Poly-Si capacitorsconference paper