Eschen, W.W.EschenLoetgering, L.L.LoetgeringSchuster, V.V.SchusterKlas, R.R.KlasLimpert, J.J.LimpertRothhardt, J.J.Rothhardt2022-05-062022-05-062021https://publica.fraunhofer.de/handle/publica/41706910.1364/ISA.2021.IF2H.3Nanoscale imaging at 13.5 nm provides ideal opportunities for âat wavelengthâ metrology. We present a setup and the latest results on lensless ptychographic imaging at 92 eV achieving sub 30 nm resolution.en13.5 nmAt-wavelength metrologieshigh resolutionnano-scale imagingNm resolution620conference paper