Wende, U.U.WendeKunze, D.D.KunzeGottfried Gottfried, R.R.Gottfried Gottfried2022-03-092022-03-091996https://publica.fraunhofer.de/handle/publica/326730An integrated fluxgate sensor fabricated in a CMOS-compatible technology is investigated by measurements and theoretical analysis. We report on magnetic field calculations for a thin core with nonlinear ferromagnetic material properties and the method to bring FEM-calculations and measurement results together by a transient analysis and search algorithm. Experimental results are compared to numerical analysis.enCMOSdünne magnetische Schichtferromagnetischer StoffFluxgate-SensorMagnetfeldMethode der finiten ElementeSignalanalyse621Planar fluxgate sensors, experimental data and theoretical analysisconference paper