Asadchikov, V.E.V.E.AsadchikovDuparre, A.A.DuparreJakobs, S.S.JakobsKarabekov, Y.Y.KarabekovKozhevnikov, I.V.I.V.Kozhevnikov2022-03-032022-03-031999https://publica.fraunhofer.de/handle/publica/19448910.1364/AO.38.000684The surface roughness of polished glass substrates and optical thin-film coatings is studied with atomic force microscopy and x-ray scattering. It is demonstrated that both methods permit the determination of power spectral density functions in a wide range of spatial frequencies. The results are in good quantitative agreement.enatomic force microscopysurface roughnessthin filmsx-ray scattering620535journal article