Under CopyrightBiro, DanielDanielBiroSchultz, OliverOliverSchultzPreu, RalfRalfPreuBallif, ChristopheChristopheBallifZickermann, D.D.ZickermannLüdemann, RalfRalfLüdemann2022-03-0927.10.20122002https://publica.fraunhofer.de/handle/publica/34184210.24406/publica-fhg-341842A thorough analysis of emitter formation by screen printed phosphorus dopant pastes is presented. For the diffusion short processes ranging from 2 up to 10 minutes plateau time have been investigated using an RTP reactor and a conveyor belt furnace respectively. Using samples for lifetime and dopant profile measurement processes for selective emitter formation are selected. Solar cells have been processed for the most promising process schemes.enconference paper