Pethica, J.B.J.B.PethicaGobrecht, J.J.GobrechtSchueler, C.C.SchuelerKoidl, P.P.Koidl2022-03-022022-03-021985https://publica.fraunhofer.de/handle/publica/172785enamorpher KohlenstoffMikrohaerte621667533Micromechanical investigations of amorphous hydrogenated carbon filmsjournal article