Flying wafer - A standardised methodology for multi-site processing Of 300 Mm wafers at research and development-sites

Frickinger, J.J.FrickingerÖchsner, R.R.ÖchsnerSchellenberger, M.M.SchellenbergerPfeffer, M.M.PfefferPfitzner, L.L.PfitznerRyssel, H.H.RysselClaes, M.M.ClaesBearda, T.T.BeardaRenaud, D.D.RenaudDanel, A.A.DanelLering, M.M.LeringGraef, M.M.GraefKaushik, V.V.KaushikMurphy, B.B.MurphyFritzsche, M.M.FritzscheWalther, H.H.WaltherHury, S.S.Hury2022-03-102022-03-102006https://publica.fraunhofer.de/handle/publica/353085en670620530Flying wafer - A standardised methodology for multi-site processing Of 300 Mm wafers at research and development-sitesconference paper