Fritz, J.J.FritzLackmann, R.R.Lackmann2022-03-082022-03-081989https://publica.fraunhofer.de/handle/publica/316946As an approach towards automated contactless IC probing we describe a laser beam test system for failure analysis in digital CMOS circuits coupled to the CAD data base. The CAD coupling was realized between a VME host and a VAX computer. Task control and image processing is done by a VME control process. After introducing the hard- and software of the realized configuration a typical application example explains the system performance.en621conference paper