Kießling, H.H.KießlingDamm, C.C.DammDannberg, P.P.DannbergRudolf, M.M.Rudolf2022-03-032022-03-031997https://publica.fraunhofer.de/handle/publica/191048An important prerequisite for large-scale industrial use of new microsystems with micromechanical, microelectrical and microoptical components is possibility of low-cost production of these systems in large numbers. Replication techniques such an embossing and injection moulding offer this opportunity. In order to assess the prospects and limitation of this technique a device for hot embossing was developed at the Fraunhofer Institution in Jena.dediffraktive OptikHeißprägenintegrierte OptikMikrostrukturpolymerReplikation620journal article