Simulation of the effect of a resist-surface bound air bubble on imaging in immersion lithography

Bisschop, P. deP. deBisschopErdmann, A.A.ErdmannRathsfeld, A.A.Rathsfeld2022-03-102022-03-102005https://publica.fraunhofer.de/handle/publica/34933710.1117/12.599792en670620530Simulation of the effect of a resist-surface bound air bubble on imaging in immersion lithographyconference paper