High Mobility TCOs for Silicon Heterojunction Solar Cells. The Sputter Deposition of Broadband Transparent and Highly Conductive Cerium and Hydrogen Co-Doped Indium Oxide and its Transfer to SHJ Solar Cells

Under CopyrightTutsch, LeonardLeonardTutschSai, H.H.SaiMatsui, TakuyaTakuyaMatsuiBivour, MartinMartinBivourHermle, MartinMartinHermleKoida, T.T.Koida2022-03-1417.12.20202020https://publica.fraunhofer.de/handle/publica/40961010.24406/publica-fhg-409610enPhotovoltaikSilicium-PhotovoltaikHerstellung und Analyse von hocheffizienten Si-Solarzellen621697High Mobility TCOs for Silicon Heterojunction Solar Cells. The Sputter Deposition of Broadband Transparent and Highly Conductive Cerium and Hydrogen Co-Doped Indium Oxide and its Transfer to SHJ Solar Cellspresentation