Czernohorsky, MalteLakner, HubertFischer, Wolf-JoachimPoduval, Geedhika KallidilGeedhika KallidilPoduval2022-03-072022-03-072016https://publica.fraunhofer.de/handle/publica/281091en621Characterization of low temperature plasma generated oxides on germanium based substratesmaster thesis