Kofod, G.G.KofodMcCarthy, D.N.D.N.McCarthyKrissler, J.J.KrisslerLang, G.G.LangJordan, G.G.Jordan2022-03-042022-03-042009https://publica.fraunhofer.de/handle/publica/21870610.1063/1.3134002We present accurate electromechanical measurements on a balanced push-pull dielectric elastomer actuator, demonstrating submicrometer accurate position control. An analytical model based on a simplified pure-shear dielectric elastomer film with prestretch is found to capture the voltage-displacement behavior, with reduced output due to the boundary conditions. Two complementary experiments show that actuation coefficients of 0.5-1 nm/V-2 are obtainable with the demonstrated device, enabling motion control with submicrometer accuracy in a voltage range below 200 V.en621journal article