Schulze, W.W.SchulzeWehner, M.M.WehnerHerziger, G.G.HerzigerPoprawe, R.R.Poprawe2022-03-022022-03-021989https://publica.fraunhofer.de/handle/publica/177046Excimer lasers for special microfinishing. Excimer lasers with their UV radiation are just beginning to be industrially exploited. They achieve high levels of performance when called upon to modify a surface finish and to bore tiny holes in metal, plastics and glass. The data and examples provided here permit to assess their practical application.deEdelgas-Halogenid-Laserexcimer lasermicroprocessingMikrobearbeitungnoble-gas-halid-laserpulse powerPulsleistungQuantenenergiequantum energy621620journal article