Vogel, D.D.VogelMaus, I.I.MausSchindler-Saefkow, F.F.Schindler-SaefkowMichel, B.B.Michel2022-03-112022-03-112010https://publica.fraunhofer.de/handle/publica/36995610.1117/12.851853Three different methods of stress measurement with strong spatial resolution are presented. They base on stress relief techniques caused by focused ion beam milling, on altered electron backscattering by deformed lattices and on Stokes line shift measurements by Raman spectroscopy. The capability of these methods is demonstrated by their application to typical MEMS structures. A comparison between the methods is performed in order to outline potentials and limitations.en621conference paper