ta-C and modified ta-C:X films for demanding tribological applications

Weihnacht, V.V.WeihnachtScheibe, H.-J.H.-J.ScheibeLeson, A.A.Leson2022-03-102022-03-102008https://publica.fraunhofer.de/handle/publica/360038en621671ta-C and modified ta-C:X films for demanding tribological applicationsconference paper