Grahmann, JanJanGrahmann2022-03-132022-03-132016https://publica.fraunhofer.de/handle/publica/39368910.1364/AIO.2016.AIT4B.32-s2.0-850161754582-s2.0-85019529420The combination of an external cavity quantum cascade laser with a MOEMS based scanning diffraction grating of 1 kHz resonance frequency and its electrostatic drive is described. The characteristics of the MOEMS scan module as well as of the entire µEC-QCL like spectral line width and wavelength reproducibility are shown. Finally the µEC-QCL is used as light source for real time spectroscopic sensing of polystyrene and carbon monoxide. Article not available.enconference paper