High-resolution material and surface topography characterization by a modified low-coherence interferometer

Under CopyrightTaudt, ChristopherChristopherTaudtBaselt, TobiasTobiasBaseltNelsen, BryanBryanNelsenKoch, EdmundEdmundKochHartmann, PeterPeterHartmann2022-03-1323.12.20152015https://publica.fraunhofer.de/handle/publica/39035310.24406/publica-fhg-390353en621671High-resolution material and surface topography characterization by a modified low-coherence interferometerposter