Evaluation of an advanced submicron X-ray stepper -XRS200- pattern transfer and alignment accuracy

Simon, K.K.SimonGabeli, F.F.Gabeli2022-03-032022-03-031991https://publica.fraunhofer.de/handle/publica/17991610.1016/0167-9317(91)90100-Ren621Evaluation of an advanced submicron X-ray stepper -XRS200- pattern transfer and alignment accuracyjournal article