Optical in-situ measurement of the dissolution rate of a Silica-Czochralski-crucible with silicon melt and comparison to ex-situ measurements

Mühe, A.A.MüheMüller, G.G.Müller2022-03-032022-03-032001https://publica.fraunhofer.de/handle/publica/19896310.1016/S0167-9317(00)00518-9en670620530621Optical in-situ measurement of the dissolution rate of a Silica-Czochralski-crucible with silicon melt and comparison to ex-situ measurementsjournal article